The vacuum furnace of the vacuum coating machine is used to heat the article in a vacuum environment, which will cause uneven heating of the workpiece and large deformation. Generally, a motor set under the vacuum furnace is used to drive the rotation of the hanger to solve the uneven heating of the workpiece. Problem, but its sealing is poor, the effect of vacuum is not good, and the production efficiency is low; and it affects the coating effect, and the yield of the finished product is low.
In order to overcome the shortcomings and deficiencies in the prior art, a vacuum coating system is provided. This system is integrated with a vacuum coating system and a vacuum glove box system. It can complete thin film evaporation in a high vacuum evaporation chamber and The glove box is used for high-purity inert gas storage for sample storage, preparation, and sample detection after evaporation. The combination of evaporation coating and glove box realizes the fully enclosed production of evaporation, packaging, and testing processes, so that the entire film growth and device preparation process is highly integrated in a complete controllable environment atmosphere system, eliminating the organic large area circuit preparation The influence of unstable factors in the atmospheric environment guarantees the preparation of high-performance, large-area organic optoelectronic devices and circuits.
The vacuum coating system has high production efficiency and high yield rate of finished products. This equipment is mainly used for experimental research and application of solar cell perovskite, OLED and PLED, semiconductor preparation and so on.