In a vacuum environment, the technique of heating and plating a material onto a substrate is vacuum evaporation. Specifically, vacuum evaporation is a process in which a substance to be formed into a film is placed in a vacuum for evaporation or sublimation, so as to precipitate it on the surface of a workpiece or a substrate. The coating in vacuum evaporation is usually an aluminum film, but other coatings can also be formed by evaporation deposition. However, the existing coating machine has a complicated structure and high cost, and cannot fully meet the needs of industrial production, which is not conducive to reducing the cost of coating products.
Provide a glove box vapor deposition all-in-one machine. This system is a combination of a vacuum coating system and a vacuum glove box system. It can complete thin film evaporation in a high vacuum evaporation chamber and perform it in a high purity inert gas atmosphere, storage and preparation of samples and testing of samples after evaporation.
The combination of evaporation coating and glove box realizes the fully enclosed production of evaporation, packaging, and testing processes, so that the entire film growth and device preparation process is highly integrated in a complete controllable environment atmosphere system, eliminating the organic large area circuit preparation The influence of unstable factors in the atmospheric environment guarantees the preparation of high-performance, large-area organic optoelectronic devices and circuits.
Vacuum coating system: It is mainly used for experimental research and application of solar cell perovskite, OLED and PLED, semiconductor preparation and so on.