Manufacturing Method of Vacuum Coating System

To heat the article in a vacuum environment can use the vacuum furnace of the vacuum coating machine. It will cause uneven heating of the workpiece and large deformation.

Generally, to drive the rotation of the hanger to solve the uneven heating of the workpiece can set a motor  under the vacuum furnace. Problem, but its sealing is poor. The effect of vacuum is not good, and the production efficiency is low. It affects the coating effect, and the yield of the finished product is low.

In order to overcome the shortcomings and deficiencies in the prior art, a vacuum coating system is provided. A vacuum coating system and a vacuum glove box system integrate with this system.

It can complete thin film evaporation in a high vacuum evaporation chamber.  The glove box is used for high-purity inert gas storage for sample storage, preparation, and sample detection after evaporation.

The combination of evaporation coating and glove box realizes the fully enclosed production of evaporation, packaging, and testing processes.

So that the entire film growth and device preparation process integrates highly in a complete controllable environment atmosphere system.   It eliminates the organic large area circuit preparation. The influence of unstable factors in the atmospheric environment guarantees the preparation of high-performance. And it gurantees  large-area organic optoelectronic devices and circuits.

The vacuum coating system has high production efficiency and high yield rate of finished products. A lot of fields have used this equipment. They are experimental research and application of solar cell perovskite, OLED and PLED, semiconductor preparation and so on.

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ATTO10 – Integrated Glovebox , Sputtering or Thermal Evaporation Thin Film Deposition System

This Inert Controlled Integrated Glove Boxes are complete standalone systems integrated with entire functional components. They are able to create an inert environment with less than 1 ppm of H2O and O2. The systems are modulated with antechambers, removable windows, adjustable trays, lighting units, adjustable shelves, and gloves, which meet most of the operational needs in the glovebox. The systems are made of welded stainless steel and are equipped with highest-quality components. We also provide optional components to meet your special requirements.

ATTO10 – Integrated Glovebox , Sputtering and Thermal/Organic Evaporation and Electron Beam Evaporation Deposition System

This Inert Controlled Integrated Glove Boxes are complete standalone systems integrated with entire functional components. They are able to create an inert environment with less than 1 ppm of H2O and O2. The systems are modulated with antechambers, removable windows, adjustable trays, lighting units, adjustable shelves, and gloves, which meet most of the operational needs in the glovebox. The systems are made of welded stainless steel and are equipped with highest-quality components. We also provide optional components to meet your special requirements.

ATTO10 + 1800 Glove Box Integrated Coating Machine

This 1800 Inert Controlled 4 Glove Integrated Glovebox System are complete standalone systems integrated with entire functional components. They are able to create an inert environment with less than 1 ppm of H2O and O2. The systems are modulated with antechambers, removable windows, adjustable trays, lighting units, adjustable shelves, and gloves, which meet most of the operational needs in the glovebox. The systems are made of welded stainless steel and are equipped with highest-quality components. We also provide optional components to meet your special requirements.

Etelux High Vacuum Resistance Thermal Evaporation & Electron Gun Coating Machine & Glove Box

This Inert Controlled High Vacuum Resistance Thermal Evaporation & Electron Gun Coating Machine & Glove Boxes are complete standalone systems integrated with entire functional components. They are able to create an inert environment with less than 1 ppm of H2O and O2. The systems are modulated with antechambers, removable windows, adjustable trays, lighting units, adjustable shelves, and gloves, which meet most of the operational needs in the glovebox. The systems are made of welded stainless steel and are equipped with highest-quality components. We also provide optional components to meet your special requirements.

Etelux Lab2000 Multi-station Coating Machine Glove Box 2000036

This Inert Controlled Multi-station Coating Machine Glovebox System are complete standalone systems integrated with entire functional components. They are able to create an inert environment with less than 1 ppm of H2O and O2. The systems are modulated with antechambers, removable windows, adjustable trays, lighting units, adjustable shelves, and gloves, which meet most of the operational needs in the glovebox. The systems are made of welded stainless steel and are equipped with highest-quality components. We also provide optional components to meet your special requirements.