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Manufacturing Method of Vacuum Coating System
To heat the article in a vacuum environment can use the vacuum furnace of the vacuum coating machine. It will cause uneven heating of the workpiece and large deformation.
Generally, to drive the rotation of the hanger to solve the uneven heating of the workpiece can set a motor under the vacuum furnace. Problem, but its sealing is poor. The effect of vacuum is not good, and the production efficiency is low. It affects the coating effect, and the yield of the finished product is low.
In order to overcome the shortcomings and deficiencies in the prior art, a vacuum coating system is provided. A vacuum coating system and a vacuum glove box system integrate with this system.
It can complete thin film evaporation in a high vacuum evaporation chamber. The glove box is used for high-purity inert gas storage for sample storage, preparation, and sample detection after evaporation.
The combination of evaporation coating and glove box realizes the fully enclosed production of evaporation, packaging, and testing processes.
So that the entire film growth and device preparation process integrates highly in a complete controllable environment atmosphere system. It eliminates the organic large area circuit preparation. The influence of unstable factors in the atmospheric environment guarantees the preparation of high-performance. And it gurantees large-area organic optoelectronic devices and circuits.
The vacuum coating system has high production efficiency and high yield rate of finished products. A lot of fields have used this equipment. They are experimental research and application of solar cell perovskite, OLED and PLED, semiconductor preparation and so on.
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