It not only ensures that the thin film evaporation is completed in the high vacuum evaporation chamber, but also the storage, preparation and detection of the samples after evaporation in a high purity inert gas atmosphere of the glove box.
The system has high vacuum pressure and evacuation time tests.
The industry’s best software control system with advanced programming capabilities, system flexibility,
It can be configured as a sputtering system, an electron beam system, an OLED system, a thermal evaporation system, or any combination of these processes.
A variety of optical and spectroscopic techniques can be integrated and the system integrated into a research glove box that requires an inert atmosphere.
In the semiconductor industry, MOCVD technology, microelectronic semiconductors, OLED / PLED development and production, lithium ion battery development and production, nanomaterial research, catalyst research, and research and development of perovskite solar cells