Description

Model		ATTO – 3
Main vacuum chamber		Square front door structure, size: ø300 X 400mmmm;
Sample room (optional)		Open door structure, the size is about ø200 X 300mm
Vacuum system configuration	Main vacuum chamber	Compound molecular pump, mechanical pump, pneumatic gate valve
Vacuum system configuration	Sample room	Mechanical pump, molecular pump, valve
Ultimate pressure	Main vacuum chamber	≤6. 67×10-5pa(After baking and degassing)
Ultimate pressure	Sample room	≤6.67X10-4 pa(After baking and degassing)
Recovery vacuum time	Main vacuum chamber	6. 6×10-4 pa Pa can be achieved in 30 minutes((The system is exposed to the atmosphere for a short time and filled with dry nitrogen to start pumping)
Recovery vacuum time	Sample room	6.6×10-3 Pa can be achieved in 30 minutes(The system is exposed to the atmosphere for a short time and filled with dry nitrogen to start pumping)
Magnetron target assembly		2-4 sets of permanent magnet targets; target size ø60mm (one of which can be sputtered magnetic material); each target is compatible with RF sputtering and DC sputtering; water cooling inside the target; three targets can be folded towards the center of the sample above The distance from the sample is 90 ~ 110mm; each target is equipped with a pneumatic baffle.
Substrate heating stage	Sample size	ø2 inch
	Exercise method	The substrate can rotate continuously, Rotating speed 0-30rpm
	heating	Substrate heating temperature 600℃±1℃
	Bezel form	Imported SMC corner cylinder control
Process gas system		Mass flow controller 2-4
* Optional parts	Injection chamber magnetron target assembly	Permanent magnet target, target size ø 60mm。
	Thickness meter	Domestic / import
	Quiet air pump	Oil-free lubrication
	Computer control system	Automatic control, process reading, parameter setting, real-time monitoring and other functions
Equipment Area	Host	1800X1200mm2
Equipment Area

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Gantry Machining Centers, CNC Turning Centers, Welding Robots, CNC Press Brake, Laser Cutting Machine and Helium Mass Spectrometer leak detection are among the equipment we use every day to produce our glove boxes. These facilities and equipment not only ensure the consistency of the products, but they also enable us to shorten the prototyping cycle of new product R & D and product customization.

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ATTO3 – Thermal Evaporation Thin Film Deposition System

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Categories: Multifunctional Coating, Vacuum Coating Tag: 300 Bell Cover Coating Machine

Model		ATTO – 3
Main vacuum chamber		Square front door structure, size: ø300 X 400mmmm;
Sample room (optional)		Open door structure, the size is about ø200 X 300mm
Vacuum system configuration	Main vacuum chamber	Compound molecular pump, mechanical pump, pneumatic gate valve
Vacuum system configuration	Sample room	Mechanical pump, molecular pump, valve
Ultimate pressure	Main vacuum chamber	≤6. 67×10-5pa(After baking and degassing)
Ultimate pressure	Sample room	≤6.67X10-4 pa(After baking and degassing)
Recovery vacuum time	Main vacuum chamber	6. 6×10-4 pa Pa can be achieved in 30 minutes((The system is exposed to the atmosphere for a short time and filled with dry nitrogen to start pumping)
Recovery vacuum time	Sample room	6.6×10-3 Pa can be achieved in 30 minutes(The system is exposed to the atmosphere for a short time and filled with dry nitrogen to start pumping)
Magnetron target assembly		2-4 sets of permanent magnet targets; target size ø60mm (one of which can be sputtered magnetic material); each target is compatible with RF sputtering and DC sputtering; water cooling inside the target; three targets can be folded towards the center of the sample above The distance from the sample is 90 ~ 110mm; each target is equipped with a pneumatic baffle.
Substrate heating stage	Sample size	ø2 inch
	Exercise method	The substrate can rotate continuously, Rotating speed 0-30rpm
	heating	Substrate heating temperature 600℃±1℃
	Bezel form	Imported SMC corner cylinder control
Process gas system		Mass flow controller 2-4
* Optional parts	Injection chamber magnetron target assembly	Permanent magnet target, target size ø 60mm。
	Thickness meter	Domestic / import
	Quiet air pump	Oil-free lubrication
	Computer control system	Automatic control, process reading, parameter setting, real-time monitoring and other functions
Equipment Area	Host	1800X1200mm2
Equipment Area