Multifunctional Coating Equipment and Coating Method
At present, vacuum magnetron sputtering coating machines, vacuum evaporation coating machines, vacuum multi-arc ion coating machines, etc., vacuum magnetron sputtering coating machines can coat non-metallic materials at low temperatures, vacuum evaporation coating machines and vacuum multi-arc coating machines. Ion coating machine belongs to high-temperature coating, which is suitable for coating metal materials. Each type of coating machine has its own characteristics and limits of use. If you need to coat a variety of different layers and coating metal and non-metallic materials, you need to purchase the above-mentioned various vacuum coating machines, which has the disadvantage of large equipment investment.
In order to solve the problem, a multifunctional magnetron sputtering coating system is provided. This system is integrated by vacuum coating system and vacuum glove box system, which can complete thin film evaporation in high vacuum evaporation chamber, and store, prepare and sample after evaporation in high purity inert gas atmosphere of glove box.
The multi-purpose magnetron sputtering coating system is mainly used for preparing various metal films, semiconductor films, dielectric films, magnetron films, optical films, superconducting films, sensing films and functional films with special needs.
The Atto10 + 1800 glove box is a proven glove box vapor deposition all-in-one machine. It is a rugged and versatile design standard solution. The system can be operated manually and automatically and has a wide range of deposition instrument options including: electron beam evaporators, RF and DC sputtering sources, low temperature organic evaporators and metal evaporators. There are also many system options available, such as quartz crystal monitoring, high vacuum load lock and heating, cooling, rotating or static sample stage. This system is integrated with the vacuum coating system and Lab2000 glove box system. The glove box is a box in a closed environment that is isolated from the atmosphere. Various assembly operations and other tasks can be performed inside the box through gloves. There is no water in the glove box. No oxygen, only filled with high-purity inert gas, to achieve seamless connection between the coating machine and the glove box, to solve the problem of coating products contaminated by water and oxygen molecules.
VTC-100 vacuum rotary film coating machine is mainly used for thin film formation in the laboratories of universities, research institutes. This machine utilizes high-speed rotation to evenly coat materials such as colloids and solutions with large viscosity coefficients on the surface of the sample.
VTC-200 vacuum rotary film coating machine is mainly used for thin film formation in the laboratories of universities, research institutes. This machine utilizes high-speed rotation to evenly coat materials such as colloids and solutions with large viscosity coefficients on the surface of the sample.