The Lab2000 Auto series is a multi-functional coating equipment (thermal evaporation / thermal resistance evaporation and electron beam evaporation) designed to meet the needs of researchers and electron microscopy.
They can be equipped with a variety of vacuum systems, vacuum chambers and standardized process accessories, providing a range of experimental technologies to meet the needs of modern laboratories. Can choose to configure bell-type glass chamber, cylindrical glass chamber, can also be equipped with universal front door stainless steel box chamber. The chamber has extra height and width, suitable for installing more process accessories.
Customer-selectable modular process accessories include thermal resistance evaporation sources and their control power sources, electron beam evaporation sources, shielding plates, substrate fixtures, and film thickness monitors.
The vacuum system is controlled and monitored by a touch screen PLC, which is easy to operate; high vacuum pump options include diffusion pumps, turbomolecular pumps, condensation pumps, and use oil-sealed or dry pumps as support pumps. The integrated high-vacuum valve with battery backup protects the pump and sample in unexpected situations.
Touch screen PLC automatic control vacuum system
Multiple optional thin film deposition sources and power supplies
Multiple optional sample holders
Multiple optional vacuum chambers
Intelligent high vacuum valve protection pump and sample
Compact design minimizes space requirements
No compressed air required
Complete safety using interlock protection
Organics / Polymers and OLEDs