The equipment is used to prepare multi-component, multilayer composite dense metal / non-metal, metal oxide / nitride / nitrogen oxide, non-metal oxide / nitride / nitrogen oxide and other thin film materials, where The target can be a single-component or multi-component material of metal / non-metal (including magnetic target materials), or a single-component or multi-component material of metal / non-metal compound. The samples can be annealed in-situ at the thin film deposition site in the vacuum chamber of the equipment system. In addition, the samples after magnetron sputtering coating can be selenized and sulfurized.
It can be used in materials science, physics, chemistry, microelectronics, optoelectronics, energy, catalysis, nanotechnology and other fields.
This system consists of a sample injection room, a sulfurization / selenization room, two sputtering chambers (3 targets + 4 targets), a sputtering control system, a heating system, a vacuum measurement system, a pumping system, a sample transfer control system, and an atmosphere. Control system, water circulation refrigeration system, electronic control system to complete the sample preparation process, and computer / touch screen program control system;
The system is equipped with a robotic arm that can move the sample under the vacuum environment to realize the movement of the sample between the chambers. The vacuum degree of the relevant chamber is restored to the level before the sample transfer within 15 minutes after the sample transfer between the chambers is completed;
The two sputtering chambers can achieve co-sputtering of 3 target positions and 4 target positions respectively, and there is no mutual interference between the power supply and other systems. Each target is sputtered independently of other targets and does not pollute other targets. material;
The system has perfect automatic protection function, in which the exhaust inlet of the selenization / sulfurization furnace has protection measures against steam erosion;
The structural materials of each chamber are made of high-quality stainless steel, argon arc welding and surface polishing.