Multifunctional Coating Equipment and Coating Method

At present, vacuum magnetron sputtering coating machines, vacuum evaporation coating machines, vacuum multi-arc ion coating machines, etc., vacuum magnetron sputtering coating machines can coat non-metallic materials at low temperatures, vacuum evaporation coating machines and vacuum multi-arc coating machines. Ion coating machine belongs to high-temperature coating, which is suitable for coating metal materials. Each type of coating machine has its own characteristics and limits of use. If you need to coat a variety of different layers and coating metal and non-metallic materials, you need to purchase the above-mentioned various vacuum coating machines, which has the disadvantage of large equipment investment.

In order to solve the problem, a multifunctional magnetron sputtering coating system is provided. This system is integrated by vacuum coating system and vacuum glove box system, which can complete thin film evaporation in high vacuum evaporation chamber, and store, prepare and sample after evaporation in high purity inert gas atmosphere of glove box.

The multi-purpose magnetron sputtering coating system is mainly used for preparing various metal films, semiconductor films, dielectric films, magnetron films, optical films, superconducting films, sensing films and functional films with special needs.