Vacuum coating machine is a special equipment for surface treatment of PVD film. The vacuum magnetron sputtering coating machine can be used for coating non-metallic materials at low temperature. The vacuum evaporation coating machine and vacuum multi arc ion coating machine belong to high temperature coating, which is suitable for coating metallic materials. Each kind of coating machine has its own characteristics and limits of use. For example, it needs to plating a variety of different film layers and coating metal and non-metal materials, it needs a variety of vacuum coating machines, which has the disadvantage of large equipment investment.
A multifunctional magnetron sputtering coating system is provided. The system is composed of a vacuum coating system and a vacuum glove box system, which can complete the film evaporation in a high vacuum evaporation chamber, and store, prepare and test the samples after evaporation in a high-purity inert gas atmosphere in the glove box. The combination of evaporation coating and glove box can realize the completely closed production of evaporation coating, packaging, testing and other processes, so that the whole film growth and device preparation process are highly integrated in a complete system of controllable environmental atmosphere, eliminating the influence of unstable factors in the atmospheric environment during the preparation of organic large-area circuit, and ensuring the preparation of high-performance and large-area organic photoelectric devices and circuits.
The multifunctional magnetron sputtering coating system is mainly used to prepare various metal films, semiconductor films, dielectric films, magnetron films, optical films, superconducting films, sensing films and various functional films with special needs.