At present, vacuum coating machines are special equipment for surface treatment of PVD coatings, including vacuum magnetron sputtering coating machines, vacuum evaporation coating machines, vacuum multi-arc ion coating machines, etc. Vacuum magnetron sputtering coating machines can be used at low temperatures. Non-metallic materials are used for coating. Vacuum evaporation coating machines and vacuum multi-arc ion coating machines are high-temperature coatings, which are suitable for coating metallic materials. Each type of coating machine has its own characteristics and limits of use. If you need to coat a variety of different layers and coating metal and non-metallic materials, you need to purchase the above-mentioned various vacuum coating machines, which has the disadvantage of large equipment investment.
In order to solve the above problems, a multi-functional coating device and a coating method are provided. Glove box vapor deposition all-in-one machine. This system is a combination of a vacuum coating system and a glove box system. It can complete thin film evaporation in a high vacuum evaporation chamber, and store samples in a high purity inert gas atmosphere. Preparation and testing of samples after evaporation, thay are mainly used in solar cell perovskite, OLED and PLED, semiconductor preparation and other experimental research and application.
The combination of evaporation coating and glove box realizes the fully enclosed production of evaporation, packaging, and testing processes, so that the entire film growth and device preparation process is highly integrated in a complete controllable environment atmosphere system, eliminating the organic large area circuit preparation process The influence of unstable factors in the atmospheric environment guarantees the preparation of high-performance, large-area organic optoelectronic devices and circuits.