Due to the development of modern science and technology, vacuum coating technology has developed rapidly. Thin film technology can change the surface properties of the workpiece, improve the wear resistance, oxidation resistance and corrosion resistance of the workpiece, thereby extending the service life of the workpiece. Thin film technology can also realize the preparation of optical, electrical, and semiconductor thin film devices, which has high economic value.
A vacuum coating system is proposed. This system is a combination of a vacuum coating system and a vacuum glove box system. It can complete thin film evaporation in a high vacuum evaporation chamber and store samples in a high purity inert gas atmosphere in the glove box. , Preparation and detection of samples after evaporation. Vacuum coating system is mainly used for experimental research and application of solar cell perovskite, OLED and PLED, semiconductor preparation and so on.
Advantages: The combination of evaporation coating and vacuum glove box realizes the fully enclosed production of evaporation, packaging, testing and other processes, so that the entire film growth and device preparation process is highly integrated in a complete controllable environment atmosphere system, eliminating organic large-area circuits The influence of unstable factors in the atmospheric environment during the preparation process ensures the preparation of high-performance, large-area organic optoelectronic devices and circuits.