Vacuum Coating

Vacuum Coating Equipment Knowledge Summary

What is vacuum coating equipment?

Vacuum coating equipment mainly refers to a type of coating that needs to be performed at a higher vacuum, including many types, including vacuum ion evaporation, magnetron sputtering, MBE molecular beam epitaxy, and PLD laser sputtering deposition. The main ideas are divided into evaporation and sputtering.

What needs to be coated is called the substrate, and the plated material is called the target. The substrate and the target are in the vacuum chamber.

Evaporative coating generally heats the target material to evaporate the surface components in the form of atomic groups or ions, and settles on the surface of the substrate, forming a thin film through the film formation process (scattering point-island structure-vagus structure-layer growth). For sputtering coatings, it can be simply understood as bombarding the target with electrons or high-energy lasers, and the surface components are sputtered out in the form of atomic groups or ions, and finally deposited on the substrate surface, undergoing film formation over-evaporation coating equipment + The plated product image evaporation coating equipment + plated product image process, and finally form a thin film.

Steps of using vacuum coating equipment

1 Operation of electric control cabinet

1) Water pump, air source

2) Turn on the main power

3) Turn on and maintain the power supply of the pump and vacuum gauge, and position V1 of the vacuum gauge, wait for its value to be less than 10, and then enter the next step. It takes about 5 minutes.

4) Turn on the mechanical pump and pre-pump, turn on the turbo molecular pump power and start, the vacuum gauge switch is changed to the V2 position, and it takes about 20 minutes to pump to less than 2.

5) After the turbo molecular pump reading reaches 250, turn off the pumping, open the front machine and the high valve to continue to evacuate. After the vacuum reaches a certain level, you can only open the right high vacuum meter to observe the vacuum. Only after the vacuum reaches 2 × 10-3 can the electron gun power be turned on.

Operation of 2DEF-6B electron gun power cabinet

1) Turn on the main power

2) Turn on the power of the electronic gun control I and the electronic gun control II at the same time: Press the electronic gun control I power supply, delay switch, the delay, power supply and protection lamp are on, and the delay and protection lamp are off after three minutes. Failure, the protection lamp will always be on

3) Turn on the high voltage, the high voltage will reach more than 10KV, the beam current can be adjusted to about 200mA, the curtain grid is 20V / 100mA, the filament current is 1.2A, and the deflection current swings between 1 ~ 1.7.

3 Shutdown sequence

1) Turn off the high vacuum meter head and turn off the molecular pump.

2) When the molecular pump shows 50, turn off the high valve, the fore stage, and the mechanical pump in sequence. This period takes about 40 minutes.

3) When it is below 50, turn off the maintenance pump again

Scope of application of vacuum coating equipment

  1. Construction hardware: bathroom hardware (such as faucets), door locks, door handles, bathroom, door locks, hardware hinges, furniture, etc.
  2. Watchmaking industry: It can be used for coating and crystal products of watch cases and straps.
  3. Other small hardware: leather hardware, stainless steel tableware, glasses frames, cutters, molds, etc.
  4. Large workpieces: automobile wheels, stainless steel plates, signs, sculptures, etc
  5. Stainless steel tubes and plates (various types of surfaces)
  6. Furniture, lamps, hotel utensils
  7. Locks, handles, bathroom hardware, golf heads, stainless steel cutlery, blood and other hardware products are coated with super hard decorative film.
  8. Accessories such as glasses and jewelry are plated with ultra-abrasion-resistant decoration (gold and silver) nano films and nano films and nano laminated films.

Maintenance and maintenance methods

  1. The vacuum coating equipment should clean the studio once every 200 or more coating procedures are completed.

The method is: repeatedly scrub the interior wall of the vacuum chamber with a saturated solution of caustic soda (NaOH) (note that human skin should not directly contact the caustic soda solution to avoid burns). The purpose is to make the coated aluminum (AL) react with NaOH. The layer falls off and hydrogen gas is released. Then clean the vacuum chamber with clean water and clean the dirt in the fine extraction valve with cloth dipped in gasoline.

  1. When the rough pump (slide valve pump, rotary vane pump) works continuously for one month (half in the rainy season), new oil needs to be replaced.

The method is: unscrew the oil bolt, drain the old oil, and then start the pump for a few seconds, so that the old oil in the pump is completely discharged. Tighten the oil bolt, add new oil to the rated amount (Oil sight glass observation). Continuous use for more than half a year, the oil cap should be opened when changing oil, and wipe the dirt in the box with a cloth.

  1. The diffusion pump has been used continuously for more than 6 months, the pumping speed is obviously slow, or the operation is improper, fill the atmosphere, remove the connecting water pipe, remove the electric stove plate, unscrew the first-level nozzle, first use gasoline to pump the cavity and pump Wash the gallbladder match once, then wash it with washing powder and water, then wash it thoroughly with clean water. After the water has evaporated, install the pump bile, add the new diffusion pump oil, and put it back in the body, connect the water pipe, install Once the electric stove plate is ready, you can restart it. Before restarting, pay attention to leak detection. The method is: start the maintenance pump, close the door, and after a few minutes, observe whether the partial vacuum of the diffusion pump reaches 6X10 Pa, otherwise leak detection will be performed. Check whether the sealing ring is installed at the joint, or the sealing ring is crushed. After removing the hidden danger of air leakage, it can be heated, otherwise the diffusion pump oil will burn the ring and cannot enter the working state.

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