1. Turn off the loop and analyzer at the same time
Reason: ①The pressure in the chamber is too high for an instant, exceeding +12mbar, the system will automatically protect;
②The voltage is unstable, causing system protection.
Method: ①Check whether the pressure setting is correct, whether the pressure sensor is abnormal, whether the vacuum valve or the air supply valve of the chamber is damaged, and the pressure returns to normal, then turn on the analyzer and cycle.
②Check if the vacuum pump is broken and unable to operate.
2. The main and mini antechambers cannot replenish air
Reason: ①The air holes in the glove box leading to the large and small bins may be blocked by plastic film, etc.;
②Whether the solenoid valve is not opened.
Method: ① Determine the position of the air hole according to the direction of the pipeline, and clear the pipeline;
② Check the wiring and solenoid valve.
3. The main and mini antechambers cannot be pumped
Reasons: ①The suction holes in the main and mini antechambers are blocked by plastic film, etc. or the cabin door leaks;
②The antechamber door is not closed tightly, or the sealing ring of the main and mini antechambers warehouses is loose.
Methods: ①According to the pipeline direction, determine the position of the air hole and clear the pipeline;
②Close the antechamber door and check the size of the sealing ring;
③Check whether the working air pressure is too low (because the main antechamber air valve is a pneumatic valve).
4. The tank pressure continues to increase during cleaning
Reason: The cleaning valve is not opened, the inlet pressure is too high, and the pipeline is not smooth.
Method: ①Ensure that the pipeline is unobstructed, preferably not to be bent;
②When cleaning, the relative pressure in the tank is continuously lower than 0.5 mbar.
5. Failure of the main valve of the purification column
Reason: ①The working air pressure is less than 0.5Mpa; ②The main valve signal feedback failure.
Method: ①Replace the working gas cylinder, or check that the pressure of the auxiliary gauge of the pressure reducing valve is 0.5Mpa; ②Check the signal switch of the main valve.
6. The loop cannot be opened
Reason: low pressure or high pressure protection of the fan inverter.
Method: After the voltage stabilizes, shut down and restart after 1 minute.
