With the development of high-end microwave devices, the size of thin-film hybrid circuit board increases, the production capacity increases and the performance improves, the requirements of magnetron sputtering system for magnetron sputtering target are also higher and higher, such as film uniformity, maximum loading power and so on. The magnetic field distribution at both ends is not consistent with that in the middle, and the final effective sputtering deposition area is only in the middle, which results in a great waste of target materials, and the uniformity of deposition is limited by the magnetic field distribution and cannot be improved.
A multifunctional magnetron sputtering coating system is provided. The system is composed of a vacuum coating system and a vacuum glove box system, which can complete the film evaporation in a high vacuum evaporation chamber, and store, prepare and test the samples after evaporation in a high-purity inert gas atmosphere in the glove box.
The advantages of multi-functional magnetron sputtering coating system: the combination of evaporation coating and glove box can realize the completely closed production of evaporation coating, packaging, testing and other processes, so that the whole film growth and device preparation process are highly integrated in a complete system of controllable environment atmosphere, eliminating the influence of unstable factors in the atmospheric environment during the preparation of organic large area integrated circuit, ensuring high performance and large area Preparation of organic photoelectric devices and circuits.