Optoelectronic R&D & Manufacturing – Integrated Dual-Air-Conditioning 2400 Dual-Station Glovebox

This system goes beyond the traditional glovebox concept of only controlling atmosphere (H₂O and O₂). It integrates a high-precision temperature and humidity control unit capable of accurately regulating the temperature and relative humidity of the large internal volume. With a specially designed air-duct system, it ensures highly uniform temperature and gas-concentration fields across the 2.4-meter-wide working space, avoiding process deviations caused by positional differences inside the box.

The glovebox can be integrated with multi-source evaporation systems, spin coaters, annealing hot stages, optoelectronic test probe stations, precision dispensers, wire/bonder units and other equipment, enabling a continuous in-box workflow from substrate cleaning → thin-film deposition → device encapsulation → initial testing.

By bringing multiple previously separated process steps into a single, tightly controlled “clean room within a clean room,” it becomes the core optoelectronic process platform for cutting-edge optoelectronic laboratories or pilot production lines, and serves as key equipment for driving optoelectronic technologies from laboratory research toward industrialization.