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This system features a double-sided glovebox with twelve glove ports, allowing equipment to be integrated into a single large chamber without any physical internal partitions, so large devices (e.g., robot-arm rails) and samples can move freely. Operators can access most areas inside the chamber simultaneously from both sides, enabling complex part transfer and collaborative assembly.

The heated antechamber is a key technology for maintaining long-term, stable sub-ppm ultra-high purity. All items entering the main chamber (substrates, wafers, tools, packaging, etc.) are baked in situ at elevated temperature to remove adsorbed moisture and organics from surfaces and pores, eliminating contamination at the source.

In the single-station glovebox, a single-loop circulation purification system ensures highly consistent H₂O and O₂ levels, making it suitable for preparing, coating, drying, and handling samples that are highly sensitive to humidity and oxygen.

This system enables a complex process chain that would otherwise require transfers between multiple independent ultra-clean rooms or gloveboxes. It is an end-to-end engineering solution for the top-level challenge of complex assembly and manufacturing that cannot be exposed to air, and is commonly used in cutting-edge R&D fields with extreme requirements for reliability, purity, and integration.