Coating System

This system highly integrates an electron-beam evaporation coater (main vacuum chamber) with an inert-gas glove box. Samples or substrates are loaded from the glove box into the coater and, after deposition, are transferred directly back into the glove box, so that they are never exposed to ambient atmosphere during the entire process.

It is ideal for handling perovskites, organic semiconductors, reactive metals (Li, Mg, Al), sulfides and other air-sensitive materials whose electrodes would otherwise oxidize, hydrolyze or degrade as soon as they contact air. By perfectly combining high-vacuum evaporation technology with inert-atmosphere protection, the system solves the industry-wide challenge of preventing air-sensitive materials from exposure during preparation and transfer steps.