Description

Key Features

  • Modular design
  • Front sliding door for in-glovebox loading
  • Rear door for service access
  • Turbomolecular or cryo pumping systems
  • Base pressures <5 × 10-7 mbar
  • Metals, dielectrics and organics deposition
  • Up to 11” diameter substrates
  • Touchscreen HMI/PC for system control
  • Equipped for easy servicing
  • Comprehensive safety features and interlocks
  • Cleanroom compatible
  • Pumping: Turbomolecular or cryogenic high-vacuum pumps, rotary or scroll backing pumps.
  • Gas/pressure: Manual or automatic control via MFCs and throttle valves.
  • Load-locks: Single- and multiple-sample.
  • Stages: Rotation, heating, cooling, Z-shift, bias and planetary.
  • Shutters: Source and substrate, pneumatic or motorised.
  • Operation: Manual or automatic via front panels, touchscreen HMI or PC.
  • Process: Quartz crystal sensor heads for rate/thickness monitoring or feedback-loop control.

Typical applications

Create an oxygen-free and moisture-free environment for organometallic chemistry, organic synthesis, hydrophilic chemical handling, medical devices, electronic component handling, lithium battery handling, solar cell assembly, hemoglobin, and metabolic research, catalyst handling, medicine synthesis, nuclear industry, a membrane of organic EL preparation, etc.

Our services

Delivery

Delivery is by 1 week after contract award.

Shipping

you can choose the free shipping method for you.

Installation

we provide additional installation services .

Services

Enjoy a 3-year warranty with your installation.

We'll hook up your new appliance, test it to make sure it's working and even walk you through a quick demo on how to use your new appliance.

Account management

Glovebox Catalog

Coating Machine Catalog

How to find us

CHINA:
No. 9 Leyuan Street, Huairou, Beijing, China
TEL: 86-400-086-8156  MAIL:info@etelux-glovebox.com
USA:
750 SE Sherman St, Albany, OR 97321
TEL: 1-888-999-6186  MAIL:info@etelux-glovebox.com

 

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