During the coating process of the traditional coating machine, it is easy to be contaminated with dust or other impurities, causing it to be contaminated twice; when the paint is sprayed, the adhesion between the paint and the lens is not strong, the layer adhesion is poor, and the coating thickness is uneven Insufficient stability, easy to produce paint, or even streaks.

Provide a vacuum coating system with good coating quality and high precision. This system is a combination of vacuum coating system and vacuum glove box system. It can complete thin film evaporation in high vacuum evaporation chamber and high purity inertness in glove box. The combination of evaporation coating and glove box realizes the fully enclosed production of evaporation, packaging, and testing processes, so that the entire film growth and device preparation process is highly integrated in a complete controllable environment atmosphere system, eliminating the organic large area circuit preparation process The influence of unstable factors in the atmospheric environment guarantees the preparation of high-performance, large-area organic optoelectronic devices and circuits.