High-precision vacuum coating device. The vacuum device includes a vacuum pump and a vacuum pressure sensor. The vacuum pressure sensor is set in the central vacuum chamber; the new high-precision vacuum coating device improves the precision of coating thickness control and improves the repeatability of product processing.
Vacuum coating is a technology that produces thin film materials by physical methods. In the vacuum chamber, the atoms of the material are separated from the heating source and hit the surface of the object to be plated. It is widely used in the production of optical lenses, such as marine telescope lenses; later extended to other functional films, record aluminum plating, decorative coating and material surface modification. Vacuum evaporation coating is to heat the raw material to be formed into a thin film in a vacuum chamber, so that atoms or molecules vaporize and escape from the surface to form a vapor stream, which is incident on the solid to be coated, that is, the surface of the substrate or substrate. Thus condensing the method of forming a solid film.
The advantages of Etelux’s glove box evaporation all-in-one machine: The combination of evaporation coating and glove box realizes the fully enclosed production of evaporation, packaging, testing and other processes, so that the entire film growth and device preparation process are highly integrated in a complete controllable environment. In the system, the influence of unstable factors in the atmospheric environment during the preparation of organic large-area circuits is eliminated, and the preparation of high-performance, large-area organic optoelectronic devices and circuits is guaranteed.