1. The main and mini antechambers cannot replenish air

Reason: ①The air holes in the glove box leading to the main and mini antechambers may be blocked by plastic film, etc.; ②Whether the solenoid valve is not opened.

Methods: ①According to the direction of the pipeline, determine the position of the air hole and clear the pipeline; ②Check the wiring and solenoid valve.

2. The main and mini antechambers cannot be pumped

Reasons: ①The suction holes in the main and mini antechambers are blocked by plastic film, etc. or the antechamber door leaks; ②The antechamber door is not closed tightly, or the sealing ring of the main and mini antechambers is loose.

Method: ①Determine the position of the air hole according to the direction of the pipeline, and unblock the pipeline; ②Close the antechamber door and check the size of the sealing ring; ③Check whether the working air pressure is too low (because the main antechamber exhaust valve is a pneumatic valve).

3. The tank pressure continues to increase during cleaning

Reason: The cleaning valve is not opened, the intake pressure is too high, and the pipeline is not smooth.

Method: ①Ensure the pipeline is unobstructed, preferably not to be bent; ②When cleaning, the relative pressure in the box is continuously lower than 0.5 mbar.

4. Failure of the main valve of the purification column

Reason: ①The working air pressure is less than 0.5Mpa; ②The main valve signal feedback failure.

Method: ①Replace the working gas cylinder, or check that the pressure of the auxiliary gauge of the pressure reducing valve is 0.5Mpa; ②Check the signal switch of the main valve.

5. The loop cannot be opened

Reason: low pressure or high pressure protection of fan inverter.

Method: After the voltage stabilizes, shut down and restart after 1 minute.

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