Vacuum coating metal film is a high-vacuum condition, which uses resistance, high frequency or electronic heating to melt and vaporize the metal, and adheres to the surface of the film substrate to form a composite film. Excessive vacuum or too low will affect the performance of the coating At present, the coating machine used in the factory is not very stable in controlling the degree of vacuum, resulting in insufficient performance of the product during the production process.
Therefore, a vacuum coating system is provided. This system is a combination of a vacuum coating system and a vacuum glove box system. It can complete thin film evaporation in a high vacuum evaporation chamber and perform samples in a high purity inert gas atmosphere in the glove box.
Advantages of vacuum coating system: The combination of evaporation coating and glove box can realize the fully enclosed production of evaporation, packaging, testing and other processes, so that the entire thin film growth and device preparation process is highly integrated in a complete controllable environment atmosphere system, eliminating organic The influence of unstable factors in the atmospheric environment during the preparation of area circuits ensures the production of high-performance, large-area organic optoelectronic devices and circuits.