The existing vacuum coating machine is mainly used for coating some ordinary glass with a small amount of outgassing. Because of the large outgassing amount of large-area organic glass, low thermal deformation temperature and low rigidity, the existing vacuum coating machine cannot make large coatings. Area of plexiglass. The evaporation sources of the existing coating machine are distributed in a square shape, so that the uniformity of the coating layer is poor, and it is impossible to ensure that the large-area organic glass is not deformed during the coating process.
In order to overcome the shortcomings of the existing technology, a vacuum coating system is provided. This system is integrated by a vacuum coating system and a vacuum glove box system. The film evaporation can be completed in a high vacuum evaporation chamber, and high purity in the glove box The storage and preparation of samples and the detection of samples after evaporation are carried out under inert gas atmosphere.
The combination of evaporation coating and vacuum glove box realizes the fully enclosed production of evaporation, packaging, testing and other processes, so that the entire film growth and device preparation process is highly integrated in a complete controllable environment atmosphere system, eliminating the organic large area circuit preparation process The influence of unstable factors in the atmospheric environment ensures the preparation of high-performance, large-area organic optoelectronic devices and circuits.
Application of vacuum coating system: mainly used for experimental research and application of solar cell perovskite, OLED and PLED, semiconductor preparation, etc.